Advanced Chip Process Development Grows ALD/CVD Materials

MoO2Cl2 and WF6 projected highest growth amid supply chain resilience caution

San Diego, CA, May 30, 2024:  TECHCET — the advisory firm providing materials market information for semiconductor supply chain resilience — is forecasting the Semiconductor Precursor Materials Market to rebound by 15% in 2024, reaching $1.7 billion. This growth is driven by the recovery of the Logic and DRAM segments, alongside advancements in AI applications, as highlighted in TECHCET’s Newly Released Critical Materials Reports™ on ALD Hi-K Metals and CVD Dielectrics.

“Significant investments, driving materials development, are being made in advanced process technologies such as GAA FETs, EUV lithography, and high-k/metal gate transistors,” stated Lita Shon-Roy, TECHCET’s President/CEO. These advancements are crucial for next-generation Logic, DRAM, and 3D NAND devices.

Molybdenum (Mo) precursors, specifically MoO2Cl2, are projected to have the highest 5-year CAGR among metal precursors at 50%. Mo growth is driven by its application in next-generation devices due to favorable electrical properties. The demand for Tungsten Hexafluoride (WF6) is also expected to recover strongly, with an 18% increase in 2024. Tungsten is favored for its low resistivity and criticality for advanced semiconductor processes.

Major industry players are expanding their production capacities to meet growing demand. Companies such as Air Liquide, Merck, and Gelest/Mitsubishi Chemical Group are making significant investments in facilities in key regions like Taiwan, South Korea, and the USA.

Geopolitical tensions, particularly involving China and Russia, impact the global supply of critical metals, with China dominating production (e.g. Zr, Ge, Ga, REO) and Russia facing sanctions that disrupt supply chains. Concentrated supply sources for metals like cobalt, tungsten, and gallium increase vulnerability to disruptions from trade issues as well as from local issues such as labor strikes, regulatory changes, or natural disasters. This threat to supply chain resilience elevates the need for supply diversification and robust supply chain management.

The newly released TECHCET Critical Materials Reports™ on ALD Hi-K Metals and CVD Dielectrics contains details on market and technology trends in addition to an extensive list of supplier profiles. For the full table of contents or to request a sample report, visit

ABOUT TECHCET: TECHCET CA LLC is an advisory services firm expert in market and supply-chain analysis of electronic materials for the semiconductor, display, solar/PV, and LED industries. TECHCET offers consulting, subscription service, and reports, including the Critical Materials Council (CMC) of semiconductor fabricators and Data Subscription Service (DSS). For additional information, please email us here, call +1-480-332-8336, or go to