Interactive Periodic Table

 

 

  IA IIA

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IIIA IVA VA VIA VIIA VIIIA
1 H Hydrogen
Gases
1.008
He  Helium
Gases
4.003
2 Li
6.94
Be
9.012
B      Boron
Ceramics
Gases
10.81
C                Carbon        Dielectric Precursors     12.01 N      Nitrogen
Gases
14.01
O    Oxygen
Gases
16.00
F Fluorine
Gases
19.00
10 Ne     Neon
Gases
20.18
3 11 Na
22.99
12 Mg
24.31
IIIB IVB VB VIB VIIB |- – – – VIIIB – – – -| IB IIB 13 Al  Aluminum  Targets
ALD/CVD
CMP
Ceramics
26.98
14 Si
Silicon Wafers
Silicon Carbide
Quartz
CMP
Dielectric Precursors
28.09
15 P  Phosphorus
Gases
30.97
16 S Sulfur
Gases
32.06
17 Cl Chlorine
Gases
35.45
18 Ar    Argon          Gases
39.95
4 19 K
39.10
20 Ca Cadmium
CMP      
40.08
21 Sc
44.96
22 Ti Titanium
Targets
ALD/CVD
CMP
47.88
23 V
50.94
24 Cr
52.00
25 Mn Manganese
Targets
ALD/CVD
CMP
54.94
26 Fe
55.85
27 Co Cobalt
Targets
ALD/CVD
CMP
58.93
28 Ni   Nickel
Targets
ALD/CVD
CMP
58.69
29 Cu    Copper
Targets
ALD/CVD
CMP
63.55
30 Zn     Zinc
Targets
ALD/CVD
CMP
65.39
31 Ga  GalliumALD/CVD 69.72 32 Ge Germanium
ALD/CVD
72.64
33 As Arsenic
Gases
74.92
34 Se
78.96
35 Br
79.90
36 Kr
83.79
5 37 Rb
85.47
38 Sr Strontium
ALD/CVD
87.62
39 Y  Yttrium
Ceramics
88.92
40 Zr Zirconium
ALD/CVD
91.22
41 Nb
92.91
42 Mo Molybdenum
Targets
ALD/CVD
CMP
95.96
43 Tc
(98)
44 Ru Ruthenium
Targets
ALD/CVD
CMP
101.1
45 Rh
102.9
46 Pd
106.4
47 Ag    Silver
Targets
107.9
48 Cd
112.4
49 In  Indium
Targets
ALD/CVD
114.8
50 Sn
118.7
51 Sb
121.8
52 Te
127.6
53 I
126.9
54 Xe Xenon
Gases
131.3
6 55 Cs
132.9
56 Ba Barium
ALD/CVD
137.3
* 72 Hf Hafnium
ALD/CVD
178.5
73 Ta Tantalum
Targets
ALD/CVD
CMP
180.9
74 W Tungsten
Targets
ALD/CVD
CMP
183.9
75 Re
186.2
76 Os
190.2
77 Ir
192.2
78 Pt Platinium
ALD/CVD
Targets
195.1
79 Au      Gold
Targets
197.0
80 Hg
200.5
81 TI
204.3
82 Pb
207.2
83 Bi
209.0
84 Po
(209)
85 At
(210)
86 Rn
(222)
7 87 Fr
(223)
88 Ra
(226)
** 104 Rf
(265)
105 Db
(268)
106 Sg
(271)
107 Bh
(270)
108 Hs
(277)
109 Mt
(276)
110 Ds
(281)
111 Rg
(280)
112 Cn
(285)
113 Uut
(284)
114 Fl
(289)
115 Uup
(288)
116
Lv
(293)
117
Uus
(294)
118
Uuo
(294)
 

 

Lanthanide Series* 57 La  Lanthanum ALD/CVD
138.9
58 Ce

Cerium
CMP
140.1

59 Pr
140.9
60 Nd
144.2
61 Pm
(145)
62 Sm
150.4
63 Eu
152.0
64 Gd
157.2
65 Tb
158.9
66 Dy
162.5
67 Ho
164.9
68 Er
167.3
69 Tm
168.9
70 Yb
173.0
71 Lu
175.0
Actinide Series** 89 Ac
(227)
90 Th
232
91 Pa
231
92 U
238
93 Np
(237)
94 Pu
(244)
95 Am
(243)
96 Cm
(247)
97 Bk
(247)
98 Cf
(251)
99 Es
(252)
100 Fm
(257)
101 Md
(258)
102 No
(259)
103 Lr
(262)
 

 

  Alkali metals   Lanthanides
  Alkaline earth metals   Actinides
  Transition metals   Nonmetals
  Post-transition metals   Halogens
  Metalloid   Noble gases