| IA | IIA |
Techcet’s critical material reports cover the gamut of semiconductor process materials. Hover over the highlighted elements in the table to view links to our associated reports. |
IIIA | IVA | VA | VIA | VIIA | VIIIA | ||||||||||
| 1 | 1 H Hydrogen Gases 1.008 |
2 He Helium Gases 4.003 |
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| 2 | 3 Li 6.94 |
4 Be 9.012 |
5 B Boron Ceramics Gases 10.81 |
6 C Carbon Dielectrics 12.01 | 7 N Nitrogen Gases 14.01 |
8 O Oxygen Gases 16.00 |
9 F Fluorine Gases 19.00 |
10 Ne Neon Gases 20.18 |
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| 3 | 11 Na 22.99 |
12 Mg 24.31 |
IIIB | IVB | VB | VIB | VIIB | |- – – – VIIIB – – – -| | IB | IIB | 13 Al Aluminum Targets ALD/CVD CMP Ceramics 26.98 |
14 Si Wafers SiC Quartz CMP Dielectrics 28.09 |
15 P Phosphorus Gases 30.97 |
16 S Sulfur Gases 32.06 |
17 Cl Chlorine Gases 35.45 |
18 Ar Argon Gases 39.95 |
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| 4 | 19 K 39.10 |
20 Ca Cadmium CMP 40.08 |
21 Sc 44.96 |
22 Ti Titanium Targets ALD/CVD CMP 47.88 |
23 V 50.94 |
24 Cr 52.00 |
25 Mn Manganese Targets ALD/CVD CMP 54.94 |
26 Fe 55.85 |
27 Co Cobalt Targets ALD/CVD CMP 58.93 |
28 Ni Nickel Targets ALD/CVD CMP 58.69 |
29 Cu Copper Targets ALD/CVD CMP 63.55 |
30 Zn Zinc Targets ALD/CVD CMP 65.39 |
31 Ga Gallium ALD/CVD 69.72 |
32 Ge Germanium ALD/CVD 72.64 |
33 As Arsenic Gases 74.92 |
34 Se 78.96 |
35 Br 79.90 |
36 Kr 83.79 |
| 5 | 37 Rb 85.47 |
38 Sr Strontium ALD/CVD 87.62 |
39 Y Yttrium Ceramics 88.92 |
40 Zr Zirconium ALD/CVD 91.22 |
41 Nb 92.91 |
42 Mo Molybdenum Targets ALD/CVD CMP 95.96 |
43 Tc (98) |
44 Ru Ruthenium Targets ALD/CVD CMP 101.1 |
45 Rh 102.9 |
46 Pd 106.4 |
47 Ag Silver Targets 107.9 |
48 Cd 112.4 |
49 In Indium Targets ALD/CVD 114.8 |
50 Sn 118.7 |
51 Sb 121.8 |
52 Te 127.6 |
53 I 126.9 |
54 Xe Xenon Gases 131.3 |
| 6 | 55 Cs 132.9 |
56 Ba Barium ALD/CVD 137.3 |
* | 72 Hf Hafnium ALD/CVD 178.5 |
73 Ta Tantalum Targets ALD/CVD CMP 180.9 |
74 W Tungsten Targets ALD/CVD CMP 183.9 |
75 Re 186.2 |
76 Os 190.2 |
77 Ir 192.2 |
78 Pt Platinium ALD/CVD Targets 195.1 |
79 Au Gold Targets 197.0 |
80 Hg 200.5 |
81 TI 204.3 |
82 Pb 207.2 |
83 Bi 209.0 |
84 Po (209) |
85 At (210) |
86 Rn (222) |
| 7 | 87 Fr (223) |
88 Ra (226) |
** | 104 Rf (265) |
105 Db (268) |
106 Sg (271) |
107 Bh (270) |
108 Hs (277) |
109 Mt (276) |
110 Ds (281) |
111 Rg (280) |
112 Cn (285) |
113 Uut (284) |
114 Fl (289) |
115 Uup (288) |
116 Lv (293) |
117 Uus (294) |
118 Uuo (294) |
| Lanthanide Series* | 57 La Lanthanum ALD/CVD 138.9 |
58 Ce Cerium CMP 140.1 |
59 Pr 140.9 |
60 Nd 144.2 |
61 Pm (145) |
62 Sm 150.4 |
63 Eu 152.0 |
64 Gd 157.2 |
65 Tb 158.9 |
66 Dy 162.5 |
67 Ho 164.9 |
68 Er 167.3 |
69 Tm 168.9 |
70 Yb 173.0 |
71 Lu 175.0 |
| Actinide Series** | 89 Ac (227) |
90 Th 232 |
91 Pa 231 |
92 U 238 |
93 Np (237) |
94 Pu (244) |
95 Am (243) |
96 Cm (247) |
97 Bk (247) |
98 Cf (251) |
99 Es (252) |
100 Fm (257) |
101 Md (258) |
102 No (259) |
103 Lr (262) |
| Alkali metals | Lanthanides | ||
| Alkaline earth metals | Actinides | ||
| Transition metals | Nonmetals | ||
| Post-transition metals | Halogens | ||
| Metalloid | Noble gases |