NEON and Xenon – Supply & Demand Report

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The Neon Report provides market and business trend details on NEON used in semiconductor device manufacturing.

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Description

Click here for pdf download of full Table of Contents

1 Scope…………………………………………………………………………………………………..7
2 Executive Summary…………………………………………………………………………………7
2.1 Neon………………………………………………………………………………………………… 7
2.2 Xenon………………………………………………………………………………………………. 9
3 Overview ……………………………………………………………………………………………. 10
4 Neon Background…………………………………………………………………………………. 11
5 Neon Market: Supply & Demand ………………………………………………………………. 12
5.1 Neon Supply………………………………………………………………………………………12
5.2 Neon Demand Forecast………………………………………………………………………..17
5.3 Neon Supply vs. Demand………………………………………………………………………20
5.4 Supply Chain Logistics………………………………………………………………………….21
6 Neon Semiconductor Market Drivers (and forecast assumptions)………………………. 25
6.1 Photolithography & DUV – 248nm & 193nm Lasers……………………………………..25
6.2 Lithography Tools……………………………………………………………………………….30
6.3 The Impact of IoT………………………………………………………………………………..35
6.4 IoT Market…………………………………………………………………………………………36
6.5 Summary of DUV Laser Demand Drivers ………………………………………………….. 37
6.6 Impact of EUV ……………………………………………………………………………………38
6.7 Non-Semi Applications Using Neon …………………………………………………………38
6.8 NEON Laser Efficiency Improvements……………………………………………………..39
7 Neon Recycle ………………………………………………………………………………………. 42
8 Minimizing Risk of Neon Shortages …………………………………………………………… 43
9 Neon Summary …………………………………………………………………………………….44
10 Intro to Xenon……………………………………………………………………………………… 45
10.1 Xenon Production ……………………………………………………………………………….45
11 Xenon Market: Supply and Demand…………………………………………………………… 47
11.1 Xenon Supply …………………………………………………………………………………….47
11.2 Xenon Demand…………………………………………………………………………………..50
11.3 Xenon Supply vs. Demand …………………………………………………………………….53
11.4 Supply Chain Logistics – who make, purify, resells ……………………………………..54
12 Xenon Market Drivers & Applications (and forecast assumptions) ……………………… 55
12.1 Xenon Used for Semiconductor Applications ……………………………………………..55
12.2 Other Xenon Applications……………………………………………………………………..56
13 Xenon Recovery Systems ……………………………………………………………………….. 57
14 Xenon Future Outlook and Risk factors ………………………………………………………. 58
15 China growth ……………………………………………………………………………………….60
16 Trade Wars and Tariffs ……………………………………………………………………………64
17 Supplier Profiles …………………………………………………………………………………… 67
17.1 Air Liquide…………………………………………………………………………………………67
17.2 Linde Group……………………………………………………………………………………….67
17.3 HBIS ………………………………………………………………………………………………. 68
17.4 Messer China ……………………………………………………………………………………. 69
17.5 Peric ………………………………………………………………………………………………..71
17.6 Praxair……………………………………………………………………………………………..72
17.7 TNSC – Matheson………………………………………………………………………………..72
18 Bibliography ……………………………………………………………………………………….. 74
19 Appendix A: neon and xenon Production Overview ……………………………………….. 75
20 Appendix B: Excimer Lasers Usage and neon ……………………………………………….. 79
20.1 Technology Node Impact………………………………………………………………………81
21 Appendix C: neon & xenon from the Ukraine ……………………………………………….. 85
21.1 Russia/Ukraine neon and Xenon Production …………………………………………….. 88
22 Appendix D: LCD & OLED Applications & neon ……………………………………………..89
22.1 Impact of EUV ……………………………………………………………………………………91
23 Appendix E: xenon Applications ………………………………………………………………..94
23.1 Aerospace Market Drivers……………………………………………………………………. 94
23.2 Medical …………………………………………………………………………………………… 96
23.3 Lighting ……………………………………………………………………………………………97
23.4 PDP (Plasma Display Panels)………………………………………………………………… 98
23.5 Etching and impact of 3D NAND……………………………………………………………. 98
24 Appendix F: Etch Mechanism for Xe / XeF2 ………………………………………………… 102

Table of Figures
Figure 1 WW neon Capacity Share 2017 (% of total volume)……………………………………………..14
Figure 2 Neon Production by Region 2017 ……………………………………………………………………..15
Taken this into consideration, TECHCET estimates WW capacity growth of 5% per year over
the next 5 years. Our projections on WW neon capacity are shown in the following figure.
Figure 3 Neon Production Capacity Forecast………………………………………………………………….16
Figure 4 2018 Neon Application Share Estimate(% of WW Consumption)…………………………..19
Figure 5 Neon Demand Forecast ………………………………………………………………………………….20
Figure 6 Neon Supply vs. Demand Forecast …………………………………………………………………..21
Figure 7 Rare Gas Supply-Chain Flow Diagram ……………………………………………………………….23
Figure 8 TECHCET Wafer Starts per Technology Node Model ………………………………………….27
Figure 9 Relative Number of Laser Process Steps by Node……………………………………………… 28
Figure 10 neon Semiconductor Consumption Forecast Estimates 2016-2023…………………….. 29
Figure 11 Total Installed Base Steppers (Estimate) …………………………………………………………. 31
Figure 12 Double Patterning ArFi………………………………………………………………………………….32
Figure 13 Immersion Multi Patterning Process Steps ………………………………………………………33
Figure 14: Mask Layers per Node Planar versus V NAND (ASML 2014)……………………………….34
Figure 15 3D NAND Complexity (Prabu Gopalraja, 2013)………………………………………………….35
Figure 16 CAGR for IoT Devices ……………………………………………………………………………………36
Figure 17 Injection Locked Laser (Takahito Kumazaki, 2015)…………………………………………….39
Figure 18 GTA Common Platform Configuration (Common Platform for TwinChamber)…….. 40
Figure 19 Gigaphoton Platform versus Laser Power (Common Platform for TwinChamber)… 40
Figure 20 Facility for purification and separation of Kr and xenon ……………………………………. 46
Figure 21 2018 Xe Production Capacity (~13 Million Liters)……………………………………………… 48
Figure 22 Xenon Supply/Capacity Forecast……………………………………………………………………50
Figure 25 Xenon Applications in 2018 (~13 million liters)………………………………………………….51
Figure 23 Xenon Demand by Application (Nm3/yr.)…………………………………………………………52
.Figure 24 Xenon Supply/Demand forecast ……………………………………………………………………54
Figure 26 3D NAND Growth…………………………………………………………………………………………55
Figure 27 Dep and Etch Process for 3D NAND(Lam 2017)…………………………………………………56
Figure 28 Semiconductor Consumption by Region History & Forecast (IBS 2017) ………………. 60
Figure 29 China’s Chip Consumption Compared with China Chip Production (IBS 2017) ……….61
Figure 30 Chinese 300mm Wafer Capacity, 2017-2020 (R. Chang, CMC Conference 2017) …… 62
Figure 31 neon Production Flow Chart (V. L. BONDARENKO, 2011)…………………………………..78
Figure 32 Halogen Depletion Effects……………………………………………………………………………. 80
Figure 33 Laser Gas Replenish Cycles…………………………………………………………………………… 80
Figure 34 iGLX (Cymer) (Ivan Lalovic, 2011)……………………………………………………………………81
Figure 35 Immersion Roadmap for ASML vs. Technology Node (McLaren, October 2014)…… 82
Figure 36 New Systems buys vs Upgrades by Nodes(McLaren, October, 2014)………………….. 82
Figure 37 Upgradable DUV Tools (ASML, McLaren)…………………………………………………………83
Figure 38 OLED Penetration ………………………………………………………………………………………..91
Figure 39 7nn EUV pattering. …………………………………………………………………………………….. 92
Figure 40 EUV Insertion ………………………………………………………………………………………………93
Figure 41 Satellite Payload versus Xenon Usage……………………………………………………………..95
Figure 42 Etch Mechanism for Xe……………………………………………………………………………….102
List of Tables
page #
Table 1 Impact of China Steel Production Restrictions…………………………………………………….18
Table 2 Shift neon Production (Nm3/yr. neon) ………………………………………………………………..12
Table 3 Air processed for neon Demand ………………………………………………………………………..13
Table 4 Supply Chain Table……………………………………………………………………………………….. 24
Table 5 IoT Market size and CAGR for IoT & 200mm Device Requirements…………………………37
Table 6 xenon Recovery Systems …………………………………………………………………………………58
Table 7 Tariff issues ……………………………………………………………………………………………………65
Table 8 Chart of physical properties of Atmospheric Gases ………………………………………………76
Table 9 Example of Air to neon-He Mixture (V. L. BONDARENKO) …………………………………… 77
Table 10 Etch Rate of Materials in XeF2 ………………………………………………………………………. 99
Table 11 Suppliers of XeF2 (Courtesy of Enabling Material)…………………………………………….100

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