Market Briefs – Precursor Development – ALD / CVD Systems and Precursors

Description

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1 Scope … 3
2 Market Overview … 3
3 Market Trends … 4
4 Recent ALD Equipment Developments … 5
5 Leading OEM Offerings and Precursor Types Used … 6

List of Figure and Tables

Figure 1: The most basic types of reactor geometries used in CVD and ALD 300mm process equipment (TECHCET, CMC2017 Dallas, TX). … 5

Table 1: Lam Research product line up supporting insulating dielectrics deposition and curing … 6
Table 2: Applied Materials product line up supporting insulating dielectrics deposition and curing … 7
Table 3: TEL product line up supporting insulating dielectrics deposition and curing … 8
Table 4: ASM International product line up supporting insulating dielectrics deposition and curing … 8
Table 5: South Korean OEMs product line up supporting insulating dielectrics deposition … 9
Table 6: European OEMs … 10