Description
Market Research & Supply-Chain Analysis Report on Dielectric Precursors used for Semiconductor Device Manufacturing
1 Executive Summary 11
1.1 CVD/ALD/SOD PRECURSORS – MARKET OVERVIEW 12
1.1.1 MARKET OVERVIEW - DIELECTRIC PRECURSORS 13
1.2 SEGMENT REVENUE TRENDS & FORECAST 14
1.3 MARKET TRENDS IMPACTING MATERIALS SEGMENT OUTLOOK 15
1.4 YEAR 2021 IN REVIEW 17
1.5 SEGMENT 5-YEAR REVENUE FORECAST – DIELECTRIC 18
1.6 TECHNOLOGY TRENDS 20
1.7 COMPETITIVE LANDSCAPE 21
1.8 ANALYST ASSESSMENT 22
2 Scope, Purpose, and Methodology 26
2.1 SCOPE 27
2.2 PURPOSE 28
2.3 METHODOLOGY 29
2.4 OVERVIEW OF OTHER TECHCET CMR™ REPORTS 29
3 Semiconductor Industry Market Status & Outlook 30
3.1 WORLDWIDE ECONOMY 31
3.1.1 SEMICONDUCTOR INDUSTRIES TIES TO THE GLOBAL ECONOMY 33
3.1.2 SEMICONDUCTOR SALES GROWTH 34
3.1.3 TAIWAN MONTHLY SALES TRENDS 35
3.2 ELECTRONIC GOODS MARKET 36
3.2.1 SMARTPHONES 37
3.2.2 PC UNIT SHIPMENTS 38
3.2.2.1 ELECTRIC VEHICLE (EV) MARKET TRENDS 39
3.2.2.2 INCREASE IN SEMICONDUCTOR CONTENT FOR AUTOS 40
3.2.3 SERVERS / IT MARKET 41
3.3 SEMICONDUCTOR FABRICATION GROWTH & EXPANSION 42
3.3.1 FAB EXPANSION ANNOUNCEMENT SUMMARY 43
3.3.2 WW FAB EXPANSION DRIVING GROWTH 44
3.3.3 EQUIPMENT SPENDING TRENDS 45
3.3.4 TECHNOLOGY ROADMAPS 46
3.3.5 FAB INVESTMENT ASSESSMENT 47
3.4 POLICY & TRADE TRENDS AND IMPACT 48
3.4.1POLICY AND TRADE ISSUES 49
3.5 SEMICONDUCTOR MATERIALS OUTLOOK 50
3.5.1 COULD MATERIALS CAPACITY LIMIT CHIP PRODUCTION SCHEDULES? 51
3.5.2 CONTINUED LOGISTICS ISSUES PLAGUE THE WESTERN WORLD 52
3.5.3 TECHCET WAFER STARTS FORECAST THROUGH 2026 53
3.5.4 TECHCET WAFER START FORECAST 54
3.5.5 TECHCET’S MATERIALS FORECAST 55
4 Precursor Market Trends 56
4.1 MARKET TRENDS 57
4.1.1 MARKET TRENDS – WAFER STARTS 59
4.1.2 MARKET TRENDS – WAFER STARTS LOGIC 60
4.1.3 MARKET TRENDS – WAFER STARTS DRAM 61
4.1.4 MARKET TRENDS – WAFER STARTS NAND 62
4.2 SUPPLY CAPACITY AND DEMAND, INVESTMENTS 63
4.3 TECHNICAL DRIVERS / MATERIAL CHANGES AND TRANSITIONS 65
4.3.1 GENERAL TREND LAST DECADE GOING FROM PVD & LPCVD TO PECVD 66
4.3.2 DEVICE ROADMAP 67
4.3.3 LEADING EDGE DEVICE ARCHITECTURE 68
4.3.4 LEADING EDGE LOGIC ROADMAP 69
4.3.4.1 ALD DIELECTRIC PRECURSORS FOR SPACE DEFINED MULTI-PATTERNING 70
4.3.4.2 SUMMARY OF DEVICE SEGMENT TRENDS AND OPPORTUNITIES 71
4.3.5 AN OVERVIEW OF SILICON CARBIDE AND GALLIUM NITRIDE 72
4.3.5.1 AN OVERVIEW OF SILICON CARBIDE AND GALLIUM NITRIDE 73
4.3.5.2 AN OVERVIEW OF SILICON CARBIDE AND GALLIUM NITRIDE 74
4.3.5.3 AN OVERVIEW OF SILICON CARBIDE AND GALLIUM NITRIDE 75
4.3.6 AN OVERVIEW OF SILICON CARBIDE AND GALLIUM NITRIDE (MOCVD) 76
4.3.6.1 AN OVERVIEW OF SILICON CARBIDE AND GALLIUM NITRIDE (MOCVD) 77
4.3.6.2 AN OVERVIEW OF SILICON CARBIDE AND GALLIUM NITRIDE (MOCVD) 78
4.4 DIELECTRIC PRECURSORS FILING ACTIVITY: IP FILING TRENDS 79
4.4.1 PRECURSORS FILING ACTIVITY: BY COMPANY CATEGORY 80
4.4.2 DIELECTRIC PRECURSOR IP ACTIVITY: BY DEPOSITION METHOD 81
4.4.3 ALD DIELECTRICS FOR PHOTOLITHOGRAPHY IP 82
4.5 DIELECTRIC PROCESS APPLICATIONS AND R&D 83
4.5.1 IMPACT OF EUV ON MULTI-PATTERNING FOR DRAM MANUFACTURING –
STI MODULE 84
4.5.2 AREA SELECTIVE DEPOSITION FOR USE IN ADVANCED LOGIC 85
4.5.3 DRY RESIST FOR EUV 86
4.6 REGIONAL TRENDS – DIELECTRIC PRECURSORS 87
4.6.1 REGIONAL TRENDS AND DRIVERS 88
4.6.2 REGIONAL TRENDS AND DRIVERS, CONTINUED 89
4.7 EHS AND LOGISTIC ISSUES 90
4.7.1 EHS AND LOGISTIC ISSUES – GREEN HOUSE GASES FROM
LOGIC PRODUCTION 91
4.8 CHANGES IN STANDARD PACKAGING/VALVE TYPES 92
4.9 MARKET ASSESSMENT 93
5 Segment Market Statistics and Forecasts 94
5.1 SEGMENT REVENUE TRENDS & FORECAST 95
5.1.1 CVD/ALD DIELECTRIC PRECURSOR REVENUE 2020 TO 2026 (M USD) 96
5.1.2 ASSESSMENT DIELECTRIC PRECURSORS 97
5.2 M&A ACTIVITIES 98
5.3 NEW PLANTS 99
5.4 NEW ENTRANTS - EUROPE CHINA ELECTRONIC MATERIALS (CHINA) 100
5.4.1 NEW ENTRANTS – NATA CHEMICALS 101
5.4.2 CHINA ALD DIELECTRIC RECENT DEVELOPMENT 102
5.5 PRICING TRENDS 103
5.6 COMPETITIVE LANDSCAPE — PRECURSOR SUPPLIER MARKET SHARE 104
5.6.1 COMPETITIVE LANDSCAPE — PRECURSOR MARKET BY REGION 105
5.7 MARKET LANDSCAPE — PROCESS TOOLS 106
5.7.1 MARKET LANDSCAPE — PROCESS TOOL FORECAST GROWTH 107
5.7.2 LONG TERM AND 5-YEAR WAFER EQUIPMENT FORECAST 108
5.7.3 PROCESS TOOLS SEGMENTED BY DEPOSITION METHOD 109
5.7.4 PROCESS TOOLS MADE FOR DEPOSITION, ASSESSMENT 110
6 SUB TIER MATERIAL SUPPLY CHAIN 111
6.1 SUB-TIER SUPPLY-CHAIN: INTRODUCTION 112
6.2 SUB-TIER SUPPLY-CHAIN M&A ACTIVITY 113
6.3 SUB-TIER SUPPLY-CHAIN EHS AND LOGISTICS ISSUES 114
6.4 SUB-TIER SUPPLY-CHAIN “NEW” ENTRANTS 116
6.5 SUB-TIER SUPPLY-CHAIN PLANTS UPDATES-NEW 117
6.6 SUB-TIER SUPPLY-CHAIN PRICING TRENDS 118
6.7 SUB-TIER SUPPLY-CHAIN TECHCET ANALYST ASSESSMENT 119
7 Supplier Profiles 120
ADEKA Corporation
Air Liquide
AZmax Co., Ltd
DNF Co., Ltd
Entegris
Epivalence
Gelest – Mitsubishi Chemicals
Hansol Chemical
H.C. Starck
Kojundo Chemical Laboratory
…and many more
FIGURES
FIGURE 1: DIELECTRIC PRECURSOR MARKET FORECAST 14
FIGURE 2: TOTAL PRECURSOR MARKET (M USD) 17
FIGURE 3: DIELECTRIC PRECURSOR MARKET 2020 TO 2026 18
FIGURE 4: GLOBAL ADVANCED PRECURSOR MARKET 2021 (USD) 21
FIGURE 5: GLOBAL ECONOMY AND THE ELECTRONICS SUPPLY CHAIN (2021) 33
FIGURE 6: WORLDWIDE SEMICONDUCTOR SALES 34
FIGURE 7: TECHCET’S TAIWAN SEMICONDUCTOR INDUSTRY INDEX* 35
FIGURE 8: 2021 CHIP REVENUE 36
FIGURE 9: MOBILE PHONE SHIPMENTS WW ESTIMATES 37
FIGURE 10: WORLDWIDE PC AND TABLET FORECAST, 2021, Q3 38
FIGURE 11: GLOBAL EV TRENDS 39
FIGURE 12: SEMICONDUCTOR SPEND PER VEHICLE TYPE 40
FIGURE 13: TSMC CONSTRUCTION SITE IN ARIZONA 42
FIGURE 14: CHIP EXPANSIONS 2021-2026 > US$460 B 43
FIGURE 15: SEMICONDUCTOR CHIP MANUFACTURING REGIONS OF THE WORLD 44
FIGURE 16: 3-MONTH AVERAGE SEMICONDUCTOR EQUIPMENT BILLINGS 45
FIGURE 17: OVERVIEW OF DEVICE TECHNOLOGY ROADMAP 46
FIGURE 18: EUROPE CHIP EXPANSION UPSIDE 51
FIGURE 19: TECHCET WAFER START FORECAST BY NODE 53
FIGURE 20: TECHCET WAFER START FORECAST BY LOGIC NODE 54
FIGURE 21: GLOBAL SEMICONDUCTOR MATERIALS OUTLOOK 55
FIGURE 22: FORECASTS – WAFER STARTS 2018 TO 2026 59
FIGURE 23: FORECASTS – WAFER STARTS LOGIC 300MM 60
FIGURE 24: FORECASTS – WAFER STARTS DRAM 300MM 61
FIGURE 25: ANNUAL WAFER STARTS (MILLIONS OF 200MM EQUIVALENT / YEAR) 62
FIGURE 26: ALD DIELECTRICS FOR PHOTOLITHOGRAPHY IP 65
FIGURE 27: DEVICE ARCHITECTURES 66
FIGURE 28: DEVICE ROADMAPS 67
FIGURE 29: IMEC 2021 LOGIC ROADMAP 68
FIGURE 30: SCALING AND LITHOGRAPHY TRENDS 69
FIGURE 31: IMEC 2021 LOGIC ROADMAP 69
FIGURE 32: MULTI-PATTERNING PROCESS STEPS AND SEM 70
FIGURE 33: LOW TEMP DIELECTRIC PRECURSOR DEPOSITION TEMPERATURE AND
ACTIVATION ENERGY FOR ADV. MPT/QPT 70
FIGURE 34: POWER DEVICE APPLICATION OVERVIEW 73
FIGURE 35: POWER MOSFET STRUCTURE 74
FIGURE 36: POWER DEVICE TRADEOFFS 74
FIGURE 37: MARKET SHARE EPI MOCVD EQUIP. TOTAL AVAILABLE MARKET-
US$700 M 77
FIGURE 38: IP FILING FOR CVD AND ALD DIELECTRIC PRECURSORS 79
FIGURE 39: DIELECTRIC PRECURSOR IP DISTRIBUTION (2019-2021) 80
FIGURE 40: DIELECTRIC IP FILING TRENDS BY DEP METHOD (1993 TO 2019) 81
FIGURE 41: PATENT ACTIVITY BUBBLE CHART, OF ALD DIELECTRICS AND
PHOTOLITHOGRAPHY 82
FIGURE 42: IMPACT OF EUV ON USAGE OF MULTI-PATTERNING 84
FIGURE 43: TOPOGRAPHY FOR SELECTIVE SIN 85
FIGURE 44: EXAMPLE OF LINE PATTERNS CREATED VIA “DRY RESIST”
(CVD DEPOSITION) 86
FIGURE 45: HARDMASK, LOW K & DIELCTRIC PRECURSORS REGIONAL SHARES
2021 87
FIGURE 46: ENVIRONMENTAL FOOTPRINT OF MOORES LAW 91
FIGURE 47: SEGMENTATION OF THE AMPOULE FLEER 2020 BASED ON NUMBER
OF UNITS IN THE FIELD 92
FIGURE 48: DIELECTRIC PRECURSOR MARKET FORECAST 95
FIGURE 49: DIELECTRIC PRECURSOR MARKET 2020 TO 2026 96
FIGURE 50: ECEM PRODUCT OFFERINGS 100
FIGURE 51: SAQP FILM STRUCTURE AND PROCESS FLOW 102
FIGURE 52: TOTAL DIELECTRIC PRECURSOR MARKET SHARE 2021 (US$652 M) 104
FIGURE 53: GLOBAL ADVANCED PRECURSOR MARKET 2021 (USD) 105
FIGURE 54: SEMICONDUCTOR EQUIPMENT SEGMENTATION 106
FIGURE 55: SEMICONDUCTOR EQUIPMENT FORECAST 107
FIGURE 56: SEMICONDUCTOR MARKET SIZE AND OUTLOOK 108
FIGURE 57: SEMICONDUCTOR EQUIPMENT FORECAST 108
FIGURE 58: DEPOSITION SEGMENTS (USD BILLION) 109
FIGURE 59: TYPICAL NON-HALIDE LIGANDS USED FOR ALD PRECURSORS 112
FIGURE 60: SYSTEM DEFINITION OF THE GLOBAL ANTHROPOGENIC COBALT
CYCLE AND MODELING FRAMEWORK FOR COBALT DEMAND AND
SECONDARY SUPPLY POTENTIALS. 115
TABLES
TABLE 1: PRECURSOR MARKET GROWTH OVERVIEW (REGIONAL CONSUMPTION
BY REVENUE) 13
TABLE 2: PRECURSOR MARKET SIZE 14
TABLE 3: INDUSTRY AND ECONOMIC SUMMARY 17
TABLE 4: GLOBAL GDP AND SEMICONDUCTOR REVENUES* 31
TABLE 5: IMF ECONOMIC OUTLOOK* 32
TABLE 6: DATA CENTER SYSTEMS AND COMMUNICATION SERVICES
FORECAST 2021 41
TABLE 7: GENERAL PRECURSOR TRENDS AND OPPORTUNITIES BY DEVICE TYPE 71
TABLE 8: MOCVD APPLICATIONS - EPI DEPOSITION ON SUBSTRATE 76
TABLE 9: MOCVD EQUIPMENT VENDORS 77
TABLE 10: REGIONAL MARKETS (US$ MILLIONS) 87
TABLE 11: REGIONAL PRECURSOR MARKETS 88
TABLE 12: REGIONAL WAFER MARKETS 89
TABLE 13: PRECURSOR MARKET SIZE 95
TABLE 14: M&A ACTIVITIES 98
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