Description
Market Research & Supply-Chain Analysis Report on Electronic Gases used for Semiconductor Device Manufacturing
1 EXECUTIVE SUMMARY 13
1.1 ELECTRONIC GAS MARKET – HISTORICAL AND 5-YEAR FORECAST 14
1.2 MARKET DRIVERS FOR THE SPECIALTY GAS MARKET 15
1.2.1 SPECIALTY GAS MARKET: 5-YEAR SUPPLY & DEMAND 16
1.3 MARKET TRENDS 17
1.4 TECHNOLOGY TRENDS- DEVICE ROADMAP 20
1.4.1 TECHNOLOGY TRENDS- DEVICE SEGMENT OPPORTUNITIES 21
1.5 COMPETITIVE LANDSCAPE- ELECTRONIC GAS MARKET SHARE 22
1.6 SUPPLY CAPACITY AND DEMAND, INVESTMENTS 23
1.7 EHS AND LOGISTIC ISSUES – GREEN HOUSE GASES FROM SEMICONDUCTOR PRODUCTION 24
1.7.1 EHS AND LOGISTIC ISSUES – GREEN HOUSE GASES FROM LOGIC PRODUCTION 25
1.8 MARKET ASSESSMENT SUMMARY 26
2 SCOPE, PURPOSE AND METHODOLOGY 28
2.1 SCOPE 29
2.2 PURPOSE 30
2.3 METHODOLOGY 31
2.4 OVERVIEW OF OTHER TECHCET CMR™ REPORTS 32
3 SEMICONDUCTOR INDUSTRY MARKET STATUS & OUTLOOK 33
3.1 WORLDWIDE ECONOMY 34
3.1.1 SEMICONDUCTOR INDUSTRIES TIES TO THE GLOBAL ECONOMY 36
3.1.2 SEMICONDUCTOR SALES GROWTH 37
3.1.3 TAIWAN MONTHLY SALES TRENDS 38
3.2 ELECTRONIC GOODS MARKET 39
3.2.1 SMARTPHONES 40
3.2.2 PC UNIT SHIPMENTS 41
3.2.1.1 ELECTRIC VEHICLE (EV) MARKET TRENDS 42
3.2.1.2 INCREASE IN SEMICONDUCTOR CONTENT FOR AUTOS 43
3.2.2 SERVERS / IT MARKET 44
3.3 SEMICONDUCTOR FABRICATION GROWTH & EXPANSION 45
3.3.1 FAB EXPANSION ANNOUNCEMENT SUMMARY 46
3.3.2 WW FAB EXPANSION DRIVING GROWTH 47
3.3.3 EQUIPMENT SPENDING TRENDS 48
3.3.4 TECHNOLOGY ROADMAPS 49
3.3.5 FAB INVESTMENT ASSESSMENT 50
3.4 POLICY & TRADE TRENDS AND IMPACT 51
3.4.1 POLICY AND TRADE ISSUES 52
3.5 SEMICONDUCTOR MATERIALS OUTLOOK 53
3.5.1 COULD MATERIALS CAPACITY LIMIT CHIP PRODUCTION SCHEDULES? 54
3.5.2 CONTINUED LOGISTICS ISSUES PLAGUE THE WESTERN WORLD 55
3.5.3 TECHCET WAFER STARTS FORECAST THROUGH 2026 56
3.5.4 TECHCET WAFER START FORECAST 57
3.5.5 TECHCET’S MATERIALS FORECAST 58
4 ELECTRONIC GASES MARKET TREND 59
4.1 MARKET TRENDS DRIVING THE ELECTRONIC GAS BUSINESS 60
4.1.1 MARKET TRENDS – WAFER STARTS 62
4.1.2 MARKET TRENDS – WAFER STARTS LOGIC 63
4.1.3 MARKET TRENDS – WAFER STARTS DRAM 64
4.1.4 MARKET TRENDS – WAFER STARTS NAND 65
4.2 SUPPLY CAPACITY AND DEMAND, INVESTMENTS 66
4.2.1 WF6 MARKET DEMAND 69
4.2.2 WF6 DEMAND DRIVERS 72
4.2.3 WF6 MARKET DEMAND 73
4.3 TECHNICAL DRIVERS / MATERIAL CHANGES AND TRANSITIONS 74
4.3.1 GENERAL TREND LAST DECADE GOING FROM PVD & LPCVD TO PECVD 75
4.3.2 DEVICE ROADMAP 76
4.3.3 LEADING EDGE DEVICE ARCHITECTURE 77
4.3.4 LEADING EDGE LOGIC ROADMAP 78
4.3.5 DEPOSITION PROCESS BY DEVICE TYPE AND MATERIAL— AN OVERVIEW 79
4.3.6 DEPOSITION PROCESS BY DEVICE TYPE AND MATERIAL— AN OVERVIEW, continued 80
4.3.7 SUMMARY OF DEVICE SEGMENT TRENDS AND OPPORTUNITIES 81
4.3.8 REGIONAL TRENDS – LINDE 82
4.3.9 REGIONAL TRENDS – AIR LIQUIDE 83
4.3.10 REGIONAL TRENDS – AIR PRODUCTS 86
4.3.11 REGIONAL TRENDS – TAIYO NIPPON SANO 87
4.3.12 REGIONAL TRENDS – KOREA 88
4.3.13 REGIONAL TRENDS – CHINA 89
4.4 US SPEC GAS FOCUS & SEGMENTATION 90
4.4.1 US GROWTH FOLLOWS WAFER STARTS 91
4.4.2 SPEC GAS APPLICATIONS (FOCUS ON US MARKET) 92
4.4.3 THE US MARKETS ARE GENERALLY SMALL FOR THE CF GASES OF INTEREST
BUT EXHIBIT HEALTHY GROWTH. 93
4.4.4 THE US MARKET SIZE & GROWTH FOR SPECIALTY GASES OF INTEREST
ALSO SMALL BUT SHOWING HEALTHY GROWTH, CONTINUED 94
4.4.5 US MARKET DEPOSITION AND ETCH GASES OPPORTUNITIES 95
4.4.6 US TAM IN DOLLARS FOR INDIVIDUAL ETCH GASES— UPSIDE
FORECAST VS. ORIGINAL MODEL 96
4.4.7 US HAS A FRAGMENTED SUPPLY CHAIN 97
4.4.8 US SPEC GAS SUMMARY 98
4.4.9 SUMMARY OF OTHER REGIONAL SPECIALTY GAS ISSUES 99
4.5 EHS AND LOGISTIC ISSUES – TUNGSTEN 100
4.5.1 EHS AND LOGISTIC ISSUES – TUNGSTEN 101
4.5.2 EHS AND LOGISTIC ISSUES – RUTHENIUM 102
4.5.3 EHS AND LOGISTIC ISSUES – GREEN HOUSE GASES FROM
SEMICONDUCTOR PRODUCTION 103
4.5.4 EHS AND LOGISTIC ISSUES – GREEN HOUSE GASES FROM LOGIC PRODUCTION 104
4.5.5 EHS AND LOGISTIC ISSUES – SUSTAINABLE SEMICONDUCTOR TECHNOLOGIES
AND SYSTEMS (SSTS) RESEARCH PROGRAM 105
4.5.6 NF3 REPLACEMENT F2 GAS 106
4.5.6.1 FLUORINATED GAS REGULATIONS 107
4.5.6.2 FLUORINATED GAS REGULATIONS 108
4.5.6.3 LINDE F-GAS INSTALLATION 109
4.6 GENERAL COMMENTS ON SPECIFICATIONS AND PURITY 110
4.7 ELECTRONIC GAS SUPPLY CHAIN RISK FACTORS 111
4.7.1 GEOPOLITICAL RISKS 112
4.7.2 RUSSIA RISKS 113
4.7.3 NATIONAL GOVERNMENT FINANCIAL SUPPORT 114
4.7.4 ENVIRONMENT REGULATION RISK 115
4.7.5 ENVIRONMENT REGULATION RISK — IMPLEMENTED TREATIES AND PROTOCOLS 116
4.7.6 SUPPLY CHAIN RISKS — RAW MATERIAL PRICING 117
4.7.7 LOGISTICS 118
4.7.7.1 VOLUMES OF FREIGHT CONTAINERS 119
4.7.8 IMPORT ACTIVITY & ASSOCIATED RISKS (EXAMPLE US IMPORTS) 120
4.8 MARKET TREND ASSESSMENT 121
5 SEGMENT MARKET STATISTICS & FORECASTS 122
5.1 ELECTRONIC GAS MARKET – HISTORICAL AND 5-YEAR FORECAST 123
5.1.1 INDUSTRIAL GAS MARKET 124
5.1.2 ELECTRONIC GAS MARKET SHARE 125
5.1.3 SUPPLIER LIST, FINANCIALS AND PROFILES 126
5.1.4 MARKET DRIVERS FOR THE SPECIALTY GAS MARKET 127
5.2 SPECIALTY GAS MARKET: 5-YEAR SUPPLY & DEMAND 128
5.2.1 HE 5-YEAR SUPPLY & DEMAND 129
5.2.2 NE 5-YEAR SUPPLY & DEMAND 130
5.2.3 XE 5-YEAR SUPPLY & DEMAND 132
5.2.4 NF3 5-YEAR SUPPLY & DEMAND 134
5.2.5 TUNGSTEN HEXAFLUORIDE 5-YEAR SUPPLY & DEMAND 135
5.3 M&A ACTIVITIES 136
5.4 NEW PLANTS 137
5.4.1 NIHON SUO HOLDING CO., LTD. TO INCREASE DIBORANE CAPACITY 140
5.5 SUPPLIER PLANT CLOSURES 141
5.6 NEW ENTRANTS - EUROPE CHINA ELECTRONIC MATERIALS (CHINA) 142
5.6.1 NEW ENTRANTS - NIHON SOSO (JPN) – DIBORANE IN ASIA 143
5.6.2 NEW ENTRANTS – NATA CHEMICALS 144
5.7 PRICING TRENDS 145
5.8 PROCESS TOOLS SEGMENTED BY DEPOSITION METHOD 146
5.8.1 WFE DEPOSITION ASSESSMENT 147
5.9 CHANGES AND SHIFTS IN THE HE MARKET 148
5.9.1 RUSSIA WAR ESCALATES, PUTTING A DAMPER ON HE SUPPLY 149
5.9.2 MARKET SIZE AND GROWTH 5-YEAR HELIUM SUPPLY & DEMAND (COMPRESSED GAS) 150
5.10 GAS SUPPLY ASSESSMENT 151
6 SUB TIER MATERIAL SUPPLY CHAIN 152
6.1 SALES CHANNELS 153
6.2 LOGISTICS REQUIREMENTS 154
6.2.1 SUB-TIER SUPPLY-CHAIN: TUNGSTEN DISRUPTIONS 155
6.3 SUB-TIER SUPPLY-CHAIN M&A ACTIVITY 157
6.4 SUB-TIER SUPPLY-CHAIN EHS AND LOGISTICS ISSUES 158
6.5 SUB-TIER SUPPLY-CHAIN PRICING TRENDS 159
6.6 SUB-TIER SUPPLY-CHAIN TECHCET ANALYST ASSESSMENT 160
7 SUPPLIER PROFILES 161
ADEKA Corporation
Air Liquide
AZmax Co., Ltd
DNF Co., Ltd
Entegris
Epivalence
Gelest – Mitsubishi Chemicals
Hansol Chemical
H.C. Starck
Kojundo Chemical Laboratory
…and many more
8 APPENDIX 272
8.1 GASES USED BY MULTIPLE INDUSTRIES 273
8.1.1 SPECIALTY GAS INDUSTRY MATRIX 274
8.1.2 GASES USED FOR SEMICONDUCTOR DEVICE MANUFACTURING 275
8.1.3 GASES USED IN THE DISPLAY INDUSTRY 276
8.2 SUPPLIER LISTING BY GAS TYPE 278
8.2.1 HYDRIDES 279
8.2.2 SILICON PRECURSORS (SILANES) 280
8.2.3 ETCHANTS/CHAMBER CLEAN 281
8.2.4 DEPOSITION/MISC 282
8.2.5 BULK GASES 283
8.3 ETCH GAS ROADMAPS 284
8.3.1 ETCH ROADMAPS 1 OF 3 285
8.3.2 ETCH ROADMAPS 2 OF 3 286
8.3.3 ETCH ROADMAPS 3 OF 3 287
LIST OF FIGURES
FIGURE 1: ELECTRONIC GAS MARKET 14
FIGURE 2: ELECTRONIC GAS MARKET SEGMENTATION 15
FIGURE3: TECHCET WAFER START FORECAST BY NODE 17
FIGURE 4: TECHNOLOGY ROADMAP DEVICES 20
FIGURE 5: TOTAL ELECTRONIC GAS MARKET SHARE 2021, US$6,3 BILLION 22
FIGURE 6: CO2EQ OUTPUT FROM ETCH GASES (SOURCE: IMEC) 24
FIGURE 7: TOTAL EMISSIONS AND ENERGY USE PROJECTION PER LOGIC NODE 25
FIGURE 8: GLOBAL ECONOMY AND THE ELECTRONICS SUPPLY CHAIN (2021) 36
FIGURE 9: WORLDWIDE SEMICONDUCTOR SALES 27
FIGURE 10: TECHCET’S TAIWAN SEMICONDUCTOR INDUSTRY INDEX* 38
FIGURE 11: SEMICONDUCTOR CHIP APPLICATIONS 39
FIGURE 12: MOBILE PHONE SHIPMENTS WW ESTIMATES 40
FIGURE 13: WORLDWIDE PC AND TABLET FORECAST, 2021, Q3 41
FIGURE 14: GLOBAL EV TRENDS 42
FIGURE 15: SEMICONDUCTOR SPEND PER VEHICLE TYPE 43
FIGURE 16: TSMC CONSTRUCTION SITE IN ARIZONA. 45
FIGURE 17: CHIP EXPANSIONS 2021-2026 > US$460 B 46
FIGURE 18: SEMICONDUCTOR CHIP MANUFACTURING REGIONS OF THE WORLD 47
FIGURE 19: 3-MONTH AVERAGE SEMICONDUCTOR EQUIPMENT BILLINGS 48
FIGURE 20: OVERVIEW OF DEVICE TECHNOLOGY ROADMAP 49
FIGURE 21: EUROPE CHIP EXPANSION UPSIDE 54
FIGURE 22: TECHCET WAFER START FORECAST BY NODE 56
FIGURE 23: TECHCET WAFER START FORECAST BY LOGIC NODE 57
FIGURE 24: GLOBAL SEMICONDUCTOR MATERIALS OUTLOOK 58
FIGURE 25: FORECASTS – WAFER STARTS 2018 TO 2026 62
FIGURE 26: FORECASTS – WAFER STARTS LOGIC 300 MM 63
FIGURE 27: ANNUAL WAFER DRAM STARTS (MILLIONS OF 200MM EQUIVALENT / YEAR) 64
FIGURE 28: ANNUAL NAND WAFER STARTS (MILLIONS OF 200MM EQUIVALENT / YEAR) 65
FIGURE 29: 3DNAND STRUCTURE 69
FIGURE 30: MO PRECURSORS 70
FIGURE 31: AMPOULE TECH REQUIREMENTS 71
FIGURE 32: 3DNAND WAFER START FORECAST SHOWING USAGE OF W & MO TRANSITION 72
FIGURE 33: WAFER START FORECAST SHOWING TWO TIMING SCENARIOS WHERE MO COULD
BE INTRODUCED (MILLIONS OF 200MM EQUIVALENT / YEAR) 73
FIGURE 34: ALD FOR PHOTOLITHOGRAPHY IP 74
FIGURE 35: 3D DEVICE ARCHITECTURES 75
FIGURE 36: DEVICE TECHNOLOGY ROADMAPS 76
FIGURE 37: IMEC 2021 LOGIC ROADMAP 77
FIGURE 38: SCALING AND LITHOGRAPHY TRENDS 78
FIGURE 39: FINFET/GAA TRANSITION 79
FIGURE 40: AIR LIQUIDE REGIONAL FINANCIALS 83
FIGURE 41: AIR LIQUIDE REGIONAL FINANCIALS 84
FIGURE 42: AIR LIQUIDE REGIONAL FINANCIALS 85
FIGURE 43: WAFER START UPSIDE FROM US FAB EXPANSION 91
FIGURE 44: US REGIONAL 5-YEAR GROWTH FORECASTS FOR C4F6, C4F8,CH3F AND CH2F2 93
FIGURE 45: US REGIONAL 5-YEAR FORECASTS FOR CL2, BCL3, HBR 94
FIGURE 46 : US REGIONAL 5-YEAR FORECASTS FOR WF6 & NF3 95
FIGURE 47: WAFER START UPSIDE FROM US FAB EXPANSION 96
FIGURE 48: CO2EQ OUTPUT FROM ETCH GASES (SOURCE: IMEC) 103
FIGURE 49: TOTAL EMISSIONS AND ENERGY USE PROJECTION PER LOGIC NODE 104
FIGURE 50: F2 AND NF3 ACTIVATION 106
FIGURE 51: CHINA SPOT PRICES OF KEY RAW MATERIALS 117
FIGURE 52: PORT TRAFFIC LA AND LONG BEACH 118
FIGURE 53: CONTAINER FREIGHT PRICE IN USD 118
FIGURE 54: POLA CONTAINER VOLUMES 119
FIGURE 55: ELECTRONIC GAS MARKET 123
FIGURE 56: TOTAL INDUSTRIAL GAS MARKET 2021, US$97 BILLION 124
FIGURE 57: TOTAL ELECTRONIC GAS MARKET 2021, US$6,3 BILLION 125
FIGURE 58: ELECTRONIC GAS MARKET SEGMENTATION 127
FIGURE 59: HE WW SUPPLY AND DEMAND 129
FIGURE 60: 2026 HE MARKET SHARE - WW REGIONS 130
FIGURE 61: TOTAL NEON DEMAND VS. SUPPLY 131
FIGURE 62: TOTAL XENON DEMAND VS. SUPPLY (MILLION LITERS/YR) 132
FIGURE 63: TOTAL KRYPTON DEMAND VS. SUPPLY (MILLION LITERS/YR) 133
FIGURE 64: NF3 SUPPLY/DEMAND 134
FIGURE 65: WF6 FORECAST 135
FIGURE 66: HARDMASK SCHEMATIC 140
FIGURE 67: LATEST SITUATION MAP IN UKRAINE, SHOWING TAKEN MAURIUPOL
BUT ODESSA STILL FREE 141
FIGURE 68: ECEM PRODUCT OFFERINGS 142
FIGURE 69: NIHON SOSO ELECTRONICS GAS BUSINESS IN ASIA 143
FIGURE 70: NATA CHEMICALS FACILITIES 144
FIGURE 71: COMPRESSED NEON PRICE ESCALATION 145
FIGURE 72: DEPOSITION SEGMENTS (USD BILLION) 146
FIGURE 73: HELIUM ELECTRONICS MARKET DEMAND BASED ON APPLICATIONS ~16%
(CONSERVATIVE) TO 19% (UPSIDE) IN MCM 150
FIGURE 74: HE MATERIALS SUPPLIER TIER STRUCTURE 153
FIGURE 75: TUNGSTEN USE BY INDUSTRY (TECHCET ESTIMATE 2020) 155
FIGURE 76: ELECTRONIC SPECIALTY GASES 277
FIGURE 77: BULK GASES 277
LIST OF TABLES
TABLE 1: ELECTRONIC GAS MARKET SIZE AND GROWTH 14
TABLE 2: ELECTRONIC GAS MARKET GROWTH RATES BY END MARKET 15
TABLE 3: 5-YEAR SPECIALTY GAS SUPPLY & DEMAND 16
TABLE 4: GAS TRENDS AND OPPORTUNITIES BY DEVICE TYPE & PROCESS TECHNOLOGY 21
TABLE 5: GLOBAL GDP AND SEMICONDUCTOR REVENUES* 34
TABLE 6: IMF ECONOMIC OUTLOOK* 35
TABLE 7: DATA CENTER SYSTEMS AND COMMUNICATION SERVICES FORECAST 2021 44
TABLE 8: OVERVIEW OF DEPOSITION PROCESSES BY DEVICE TYPE AND MATERIAL 79
TABLE 9: GAS TRENDS AND OPPORTUNITIES BY DEVICE TYPE 81
TABLE 10: LINDE FINANCIALS AND REGIONAL SALES 82
TABLE 11: AIR PRODUCTS REGIONAL FINANCIALS 86
TABLE 12: TAIYO NIPPON SANSO REGIONAL FINANCIALS 87
TABLE 13: GAS SEGMENTATION GROUPS/DEFINITIONS 90
TABLE 14: GASES OF INTEREST AND APPLICATIONS 92
TABLE 15: C4F6, C4F8, CH2F2, CHF3, CAGRS (2021-2025) 93
TABLE 16: CL2, BCL3, HBR, CAGRS (2021-2025) 94
TABLE 17: WF6 AND NF3 FORECAST AND CAGRS (2021-2025) 95
TABLE 18: US TAM UPSIDE FOR WF6 AND NF3 (M$USD) 96
TABLE 19: ESTIMATED SUPPLY CHAIN SUPPLIER RANKING 97
TABLE 20: REGIONAL SUMMARY OF GAS MARKET 99
TABLE 21: GAS GWP AND ATMOSPHERIC LIFETIME 106
TABLE 22: IMPORT ACTIVITY OCTOBER 2020 THROUGH MAY 2021 120
TABLE 23: ELECTRONIC GAS MARKET SIZE AND GROWTH 123
TABLE 24: TOTAL REVENUE 2021OF MAJOR GAS COMPANIES AND GAS SUPPLIERS 126
TABLE 25: ELECTRONIC GAS MARKET GROWTH RATES BY END MARKET 127
TABLE 26: 5-YEAR SPECIALTY GAS SUPPLY & DEMAND 128
TABLE 27: M&A ACTIVITIES 136
TABLE 28: EQUIPMENT MARKET SIZE (US$ B) 146
TABLE 29: SPECIALTY GAS INDUSTRY MATRIX 274
TABLE 30: GASES USED IN FPD MANUFACTURING 276
TABLE 31: HYDRIDE GAS SUPPLIERS 279
TABLE 32: SILICON PRECURSOR SUPPLIERS 280
TABLE 33: ETCHANT GAS SUPPLIERS 281
TABLE 34: DEPOSITION/MISC. GAS SUPPLIERS 282
TABLE 35: BULK GAS SUPPLIERS 283
TABLE 36: ETCH ROADMAPS 285
TABLE 37: ETCH ROADMAPS 286
TABLE 38: ETCH ROADMAPS 287
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