Description
This report covers the market landscape and supply-chain for Precursors used in semiconductor device fabrication. It includes information about key suppliers, issues/trends in the material supply chain, estimates on supplier market share, and forecast for the material segments.
Featured Press Release on ALD/High-K Market Updates and Report Highlights:
Table of Contents:
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1 Executive Summary 12 1.1 PRECURSORS BUSINESS – MARKET OVERVIEW 13 1.2 PRECURSORS MARKET TRENDS IMPACTING 2024 OUTLOOK 14 1.3 5-YEAR UNIT SHIPMENT FORECAST BY SEGMENT: METAL AND HIGH-K PRECURSORS 15 1.4 PRECURSOR TRENDS 16 1.5 PRECURSOR TECHNOLOGY TRENDS 17 1.6 COMPETITIVE LANDSCAPE METAL & HIGH-K PRECURSORS 18 1.7 PRECURSOR EHS, TRADE, AND/OR LOGISTICS ISSUES/CONCERNS 19 1.8 ANALYST ASSESSMENT OF METAL AND HIGH-K PRECURSORS 20 2 Scope, Purpose, and Methodology 21 2.1 SCOPE 22 2.2 METHODOLOGY 23 2.3 OVERVIEW OF OTHER TECHCET CMR™ OFFERINGS 24 3 Semiconductor Industry Market Status & Outlook 25 3.1 WORLDWIDE ECONOMY AND OUTLOOK 26 3.1.1 SEMICONDUCTOR INDUSTRIES TIES TO THE GLOBAL ECONOMY 28 3.1.2 SEMICONDUCTOR SALES GROWTH 29 3.1.3 TAIWAN OUTSOURCE MANUFACTURER MONTHLY SALES TRENDS 30 3.2 CHIPS SALES BY ELECTRONIC GOODS SEGMENT 31 3.2.1 ELECTRONICS OUTLOOK 32 3.2.2 AUTOMOTIVE INDUSTRY OUTLOOK 33 3.2.2.1 ELECTRIC VEHICLE (EV) MARKET TRENDS 34 3.2.2.2 INCREASE IN SEMICONDUCTOR CONTENT FOR AUTOS 35 3.2.3 SMARTPHONE OUTLOOK 36 3.2.4 PC OUTLOOK 37 3.2.5 SERVERS / IT MARKET 38 3.3 SEMICONDUCTOR FABRICATION GROWTH & EXPANSION 39 3.3.1 IN THE MIDST OF HUGE INVESTMENT IN CHIP EXPANSIONS 40 3.3.2 NEW FABS IN THE US 41 3.3.3 WW FAB EXPANSION DRIVING GROWTH 42 3.3.4 EQUIPMENT SPENDING TRENDS 43 3.3.5 ADVANCED LOGIC TECHNOLOGY ROADMAPS 44 3.3.5.1 DRAM TECHNOLOGY ROADMAPS 45 3.3.5.2 3D NAND TECHNOLOGY ROADMAPS 46 3.3.6 FAB INVESTMENT ASSESSMENT 47 3.4 POLICY & TRADE TRENDS AND IMPACT 48 3.5 SEMICONDUCTOR MATERIALS OVERVIEW 49 3.5.1 TECHCET WAFER STARTS FORECAST THROUGH 2028 50 3.5.2 TECHCET MATERIALS MARKET FORECAST THROUGH 2028 51 4 Material Market Trends 52 4.1 CVD, ALD METAL & HIGH-K AND ADVANCED DIELECTRIC PRECURSORS MARKET TRENDS 53 4.1.1 2023 PRECURSOR MARKET LEADING INTO 2024 54 4.1.2 PRECURSOR MARKET OUTLOOK 55 4.1.3 METAL AND HIGH-K PRECURSORS 5-YEAR UNIT SHIPMENT FORECAST BY SEGMENT 56 4.2 PRECURSORS SUPPLY CAPACITY AND DEMAND, INVESTMENTS 57 4.2.1 METAL & HIGH-K PRECURSOR PRODUCTION CAPACITY OF TOP SUPPLIERS 58 4.2.2 METAL & HIGH-K PRODUCTION BY REGION 59 4.2.3 ALD/CVD MATERIAL PRODUCTION CAPACITY EXPANSIONS 60 4.2.4 INVESTMENT ANNOUNCEMENTS OVERVIEW 62 4.2.5 PRECURSORS SUPPLY VS. DEMAND BALANCE – OVERVIEW 63 4.3 PRICING TRENDS 64 4.4 TECHNOLOGY TRENDS/TECHNICAL DRIVERS - OUTLINE 65 4.4.1 PRECURSOR GENERAL TECHNOLOGY OVERVIEW & TECHNOLOGY TRENDS 66 4.4.2 CUSTOMER DRIVEN TECHNOLOGIES 67 4.4.3 NAND ROADMAPS AND CHALLENGES - 3D NAND LEVELS W/ STACKS/TIERS 68 4.4.4 3D NAND PROCESS ADVANCES REQUIRED 69 4.4.5 NEW MATERIALS AND ETCH CHEMISTRIES ENABLE 3D NAND SCALING – PF3(G) AND MOO2CL2(S) 70 4.4.6 MOLYBDENUM: THE NEW FRONTIER IN SEMICONDUCTOR METALLIZATION ACCORDING TO LAM RESEARCH 71 4.4.7 DRAM PROCESS ADVANCES REQUIRED 72 4.4.8 DRAM FUTURE TECHNOLOGY CHALLENGES 73 4.4.9 MICRON UNVEILS BREAKTHROUGH NVDRAM: A DUAL-LAYER 32GBIT NON-VOLATILE FERROELECTRIC MEMORY WITH NEAR-DRAM PERFORMANCE 74 4.4.10 ADVANCED LOGIC ROADMAPS AND CHALLENGES – LOGIC TRANSISTOR EST. ROADMAP 75 4.4.11 ADVANCED LOGIC (FOUNDRY) NODE HVM ESTIMATE 76 4.4.12 ADV LOGIC PROCESS ADVANCES REQUIRED 77 4.4.12.1 THE SEMICONDUCTOR SHOWDOWN: SAMSUNG AND TSMC'S GAA FETS VS. INTEL'S RIBBONFET 78 4.4.13 ADV LOGIC FUTURE TECHNOLOGY CHALLENGES 79 4.4.14 ADVANCING TECHNOLOGIES IMPLICATION TO PHOTOLITHOGRAPHY 81 4.4.14.1 ADVANCING TECHNOLOGIES IMPLICATION TO PHOTOLITHOGRAPHY – DSA 82 4.4.14.2 ADVANCING TECHNOLOGIES IMPLICATION TO PHOTOLITHOGRAPHY: CENTURA SCULPTA BY APPLIED MATERIALS: SHAPING THE FUTURE OF SEMICONDUCTOR MANUFACTURING 84 4.4.14.3 ADVANCING TECHNOLOGIES IMPLICATION TO PHOTOLITHOGRAPHY: LINE EDGE ROUGHNESS REDUCTION THRU DEPOSITION 85 4.4.15 CFET ARCHITECTURE: CFET SCALING ADVANTAGE 86 4.4.15.1 CFET ARCHITECTURE: COMPLEMENTARY FETS (CFETS) 87 4.4.15.2 CFET ARCHITECTURE: CFET FUTURE PROSPECTS 90 4.4.16 INORGANIC EUV RESIST – ALD DEPOSITED 92 4.4.17 MOLECULAR LAYER DEPOSITION (MLD) 93 4.4.17.1 TREND IS MLD COMBINED WITH ALD 94 4.4.17.2 DIFFERENT TYPES OF MLD PRECURSORS AND MATERIALS 95 4.4.17.3 MLD APPLICATIONS 96 4.4.18 AREA SELECTIVE DEPOSITION (ASD) 97 4.4.18.1 AREA SELECTIVE DEPOSITION (ASD) – ADEKA PRESENT ASD HF-PRECURSOR 98 4.4.18.2 AREA SELECTIVE DEPOSITION (ASD) – TU EINDHOVEN SELECTIVE ALD ENABLED BY PLASMA PRETREATMENT 99 4.4.20 SPECIALTY/EMERGING METAL AND APPLICATIONS 100 4.4.21 SPECIALTY/EMERGING HIGH-K AND APPLICATIONS 101 4.5 REGIONAL CONSIDERATIONS – METAL AND HIGH-K 102 4.5.1 REGIONAL ASPECTS AND DRIVERS 103 4.6 EHS AND TRADE/LOGISTIC ISSUES – METALS, HIGH-K AND DIELECTRICS 105 4.6.1 ESH METALS 106 4.6.2 ESH HIGH-K 107 4.6.3 ESH RECYCLING 108 4.7 TRADE/LOGISTICS ISSUES – METAL MATERIALS 109 4.7.1 TRADE/LOGISTICS ISSUES – HIGH-K MATERIALS 110 4.8 ANALYST ASSESSMENT OF HIGH-K MARKET TRENDS 111 4.8.1 ANALYST ASSESSMENT OF METAL MARKET TRENDS 112 5 Supply-Side Market Landscape 113 5.1 PRECURSOR MATERIAL MARKET SHARE 114 5.1.1 CURRENT QUARTER ACTIVITY – MERCK 115 5.1.1.1 MERCK 116 5.1.2 CURRENT QUARTER ACTIVITY – AIR LIQUIDE 118 5.1.2.1 AIR LIQUIDE 119 5.1.3 CURRENT QUARTER ACTIVITY –ENTEGRIS 120 5.1.3.1 ENTEGRIS 121 5.1.4 ADEKA 122 5.1.4.1 ADEKA 123 5.2 M&A ACTIVITY AND PARTNERSHIPS 124 5.3 PLANT CLOSURES 126 5.4 NEW ENTRANTS 127 5.4.1 MSP LAUNCHES TURBO II™ VAPORIZERS: NEXT-GEN EFFICIENCY FOR SEMICONDUCTOR FABRICATION 128 5.4.2 A NEW ZR PRECURSOR WAFER-SCALE ZIRCONIUM DIOXIDE FILMS 129 5.4.3 ADVANCES IN MOLYBDENUM THIN FILMS: NEW LIQUID PRECURSORS BOOST VAPOR PHASE DEPOSITION 130 5.4.4 HANWHA TO SUPPLY ALD EQUIPMENT FOR MOLYBDENUM DEPOSITION FOR MEMORY APPLICATIONS 131 5.5 SUPPLIERS OR PARTS/PRODUCT LINES THAT ARE AT RISK OF DISCONTINUATIONS 132 5.6 TECHCET ANALYST ASSESSMENT OF PRECURSOR SUPPLIERS 133 6 Sub Tier Supply Chain, Precursors 134 6.1 SUB-TIER SUPPLY CHAIN: SOURCES & MARKETS OVERVIEW 135 6.1.1 SUB-TIER SUPPLY CHAIN: SOURCES & MARKETS OVERVIEW – TIER 2 EXAMPLES NOURYON AND GELEST 136 6.1.2 SUB-TIER SUPPLY CHAIN: SOURCES & MARKETS OVERVIEW – CHEMICAL & GAS MANAGEMENT SYSTEMS 137 6.1.3 SUB-TIER SUPPLY CHAIN: SOURCES & MARKETS OVERVIEW – CHEMICAL DELIVERY CABINETS 138 6.1.4 SUB-TIER SUPPLY CHAIN: SOURCES & MARKETS OVERVIEW VALVE MANIFOLD BOXES (VMB) 139 6.1.5 SUB-TIER SUPPLY CHAIN: SOURCES & MARKETS OVERVIEW – BULK SPEC GAS SYSTEMS 140 6.1.6 SUB-TIER SUPPLY CHAIN: SOURCES & MARKETS OVERVIEW – GAS CABINETS 141 6.1.7 SUB-TIER SUPPLY CHAIN: SOURCES & MARKETS OVERVIEW – FORMING GAS & DOPANT GAS BLENDERS 142 6.1.8 SUB-TIER SUPPLY CHAIN: SOURCES & MARKETS OVERVIEW CHEMICAL - MONITORING AND ANALYTICAL SYSTEMS 143 6.2 SUB-TIER MATERIAL CVD & ALD PRECURSOR TRENDS 144 6.3 SUB-TIER MATERIAL INDUSTRIAL VS. SEMICONDUCTOR-GRADE 145 6.4 SEMICONDUCTOR-GRADE SUB-TIER MATERIAL SUPPLIER GLOBAL NETWORK MERCK 146 6.5 SEMICONDUCTOR-GRADE SUB-TIER MATERIAL SUPPLIER GLOBAL NETWORK AIR LIQUIDE 147 6.6 SEMICONDUCTOR-GRADE SUB-TIER MATERIAL SUPPLIER NEWS 148 6.7 SUB-TIER SUPPLY-CHAIN: DISRUPTIONS 150 6.8 SUB-TIER SUPPLY-CHAIN PLANT UPDATES 151 6.9 SUB-TIER SUPPLY-CHAIN PLANT UPDATES – HAFNIA AND REO FROM THE DUBBO PROJECT 152 6.10 MINERAL USED IN THE SEMICONDUCTOR INDUSTRY DEPENDENCIES 153 6.11 SUB-TIER SUPPLY-CHAIN PRICING TRENDS - COBALT 154 6.12 SUB-TIER SUPPLY-CHAIN PRICING TRENDS: ZIRCONIUM AND HAFNIUM 156 6.13 SUB-TIER SUPPLY-CHAIN PRICING TRENDS – HAFNIUM 157 6.14 SUB-TIER SUPPLY-CHAIN PRICING TRENDS - GALLIUM 158 6.15 ALUMINUM 160 6.16 TITANIUM 161 6.17 TUNGSTEN 162 6.18 MOLYBDENUM 163 6.19 NIOBIUM AND TANTALUM 164 6.20 RARE EARTHS 165 6.21 SUB-TIER SUPPLY-CHAIN PRICING TRENDS - PGM 166 6.22 SUB-TIER SUPPLY-CHAIN PRICING TRENDS - GERMANIUM 168 6.23 SUB-TIER SUPPLY-CHAIN TECHCET ANALYST ASSESSMENT 170 7 Supplier Profiles 171 ADEKA CORPORATION AIR LIQUIDE (MAKER, PURIFIER, SUPPLIER) AZMAX CO., LTD CITY CHEMICAL LLC DNF CO., LTD ...and 20+ more LIST OF FIGURES FIGURE 1.1: METAL & HIGH-K PRECURSOR REVENUE (M USD) FORECAST BY SEGMENT 15 FIGURE 1.2: WW MARKET SHARE - METAL & HIGH-K PRECURSORS 2023 (U$ 811 M) 18 FIGURE 3.1: GLOBAL ECONOMY AND THE ELECTRONICS SUPPLY CHAIN (2023) 28 FIGURE 3.2: WORLDWIDE SEMICONDUCTOR SALES 29 FIGURE 3.3: TECHCET’S TAIWAN SEMICONDUCTOR INDUSTRY INDEX (TTSI) 30 FIGURE 3.4: 2023 SEMICONDUCTOR CHIP APPLICATIONS 31 FIGURE 3.5: GLOBAL LIGHT VEHICLE UNIT SALES (IN MILLIONS OF UNITS) 33 FIGURE 3.6: ELECTRIFICATION TREND BY WORLD REGION 34 FIGURE 3.7: AUTOMOTIVE SEMICONDUCTOR PRODUCTION 35 FIGURE 3.8: MOBILE PHONE SHIPMENTS, WW ESTIMATES 36 FIGURE 3.9: WORLDWIDE PC AND TABLET FORECAST 37 FIGURE 3.10: TSMC PHOENIX CAMPUS WITH THE 2ND FAB VISIBLE IN THE BACKGROUND 39 FIGURE 3.11: ESTIMATED GLOBAL FAB SPENDING 2023-2028 40 FIGURE 3.12: FAB EXPANSIONS WITHIN THE US 41 FIGURE 3.13: SEMICONDUCTOR CHIP MANUFACTURING REGIONS OF THE WORLD 42 FIGURE 3.14: GLOBAL TOTAL EQUIPMENT SPENDING (US$ M) AND Y-O-Y CHANGE 43 FIGURE 3.15: ADVANCED LOGIC DEVICE TECHNOLOGY ROADMAP OVERVIEW 44 FIGURE 3.16: DRAM TECHNOLOGY ROADMAP OVERVIEW 45 FIGURE 3.17: 3D NAND TECHNOLOGY ROADMAP OVERVIEW 46 FIGURE 3.18: INTEL OHIO PLANT SITE AS OF FEB. 2024 47 FIGURE 3.19: TECHCET WAFER START FORECAST BY NODE SEGMENTS 50 FIGURE 3.20: TECHCET WORLDWIDE MATERIALS FORECAST ($M USD) 51 FIGURE 4.1: METAL & HIGH-K PRECURSOR REVENUE (M USD) FORECAST BY SEGMENT 56 FIGURE 4.2: MEMORY SUPPLY/DEMAND SITUATION 2024 57 FIGURE 4.3: WW MARKET SHARE - METAL & HIGH-K PRECURSORS 2023 (U$ 811 M) 58 FIGURE 4.4: REGIONAL MARKET SHARES 59 FIGURE 4.5: END USE APPLICATIONS DRIVING NEW DEVICE PROCESSES 67 FIGURE 4.6: 3D NAND STACKING DRIVES DIELECTRICS AND METALS PRECURSOR VOLUME 68 FIGURE 4.7: 3D NAND PROGRESSION 69 FIGURE 4.8: ETCH DEPTH PERFORMANCE 70 FIGURE 4.9: TOKYO ELECTRON’S NEW CRYOGENIC ETCH TOOL 70 FIGURE 4.10: DRAM MESH BY MICRON 72 FIGURE 4.11: IMEC CAPACITORLESS IGZO CELL FOR 3D STACKED DRAM 72 FIGURE 4.12: TRANSITION FROM 2D TO 3D DRAM 73 FIGURE 4.13: 32 GB NVDRAM WITH 1T 1C MEMORY LAYERS 74 FIGURE 4.14: GATE STRUCTURE ROADMAP 75 FIGURE 4.15: ADVANCED LOGIC (FOUNDRY) NODE ROAD MAP 76 FIGURE 4.16: LOGIC TRANSISTOR PROGRESSION 77 FIGURE 4.17: RIBBON FET 78 FIGURE 4.18: MONO LAYER NANO SHEETS CHANNELS 80 FIGURE 4.19: NANO IMPRINT LITHOGRAPHY PROCESS FLOW 81 FIGURE 4.20: ALD/ALE ENHANCEMENT OF NANO IMPRINT LITHOGRAPHY 81 FIGURE 4.21: DIRECTED SELF-ASSEMBLY 82 FIGURE 4.22: DSA PATENT FILING BY COMPANY 83 FIGURE 4.23: DSA PATEN FILING SINCE 2023 83 FIGURE 4.24: WHAT IS PATTERN SHAPING? 84 FIGURE 4.25: REFINING EUV PATTERNING BY APPLIED MATERIALS 85 FIGURE 4.26: COMPLEMENTARY FET (CFET) 86 FIGURE 4.27: CFET IMPROVES PERFORMANCE IN TRACK SCALING 86 FIGURE 4.28: MONOLITHIC CFET PROCESS FLOW EXAMPLE 87 FIGURE 4.29: MCFET NEW FEATURE: MIDDLE DIELECTRIC ISOLATION 87 FIGURE 4.30: LOW TEMPERATURE GATE STACK OPTION EXAMPLES 88 FIGURE 4.31: LOW TEMPERATURE SD/CONTACT OPTION EXAMPLES 88 FIGURE 4.32: BSPDN ADVANTAGE: IR DROP REDUCTION 89 FIGURE 4.33: INCREASING NUMBER OF ALD STEPS REQUIRED BY NEXT GENERATION GAA-FET AND CFET 90 FIGURE 4.34: IMEC SUB-1NM TRANSISTOR ROADMAP, 3D-STACKED CMOS 2.0 PLANS 91 FIGURE 4.35: PATENT FILING FOR MLD DEPOSITED EUV RESIST. SEARCH PERFORMED IN PATBASE 92 FIGURE 4.36: MOLECULAR LAYER DEPOSITION VS ATOMIC LAYER DEPOSITION 93 FIGURE 4.37: INCREASING TREND OF ALD/MLD PUBLICATIONS 94 FIGURE 4.38: ADEKA ASD-HF PRECURSORS 98 FIGURE 4.39: SELECTIVE ALD ENABLED BY PLASMA PRETREATMENT 99 FIGURE 4.40: SPECIALTY/EMERGING METAL APPLICATIONS 100 FIGURE 4.41: SPECIALTY/EMERGING HIGH-K APPLICATIONS – NVM DRAM (MICRON IEDM2023) 101 FIGURE 4.42: 2023 METAL & HIGH-K REVENUE SHARE BY REGION 102 FIGURE 4.43: EHS ISSUES – HIGH-K: MINING IN CHINA 107 FIGURE 4.44: SK HYNIX’S RECYCLED AND RENEWABLE MATERIALS TARGETS 108 FIGURE 5.1: 2023 PRECURSOR MATERIAL SUPPLIER MARKET SHARE BY REVENUE 114 FIGURE 5.2: MERCK ELECTRONICS REVENUE 2022-2023 (M EUR), LEFT. SEMICONDUCTOR SOLUTIONS ANNUAL REVENUE FORECAST (M EUR), RIGHT. 117 FIGURE 5.3: AIR LIQUIDE ELECTRONICS REVENUE FORECAST (M EUR) 119 FIGURE 5.4: THE MS (MATERIAL SOLUTIONS) DIVISION OF ENTEGRIS REVENUE FORECAST 121 FIGURE 5.5: ADEKA REVENUE ELECTRONICS REVENUE FORECAST (100M JPY) 122 FIGURE 5.6: NEW ZIRCONIUM PRECURSOR CLASS 129 FIGURE 5.7: ADVANCES IN MOLYBDENUM THIN FILMS: NEW LIQUID PRECURSORS BOOST VAPOR PHASE DEPOSITION 130 FIGURE 6.1: FORMING GAS BLENDER CONFIGURATION 142 FIGURE 6.2: TOP COUNTRIES/REGIONS THAT SUPPLY VERSUM MATERIALS US LLC (PANJIVA APRIL 2024) 146 FIGURE 6.3: TOP COUNTRIES/REGIONS THAT SUPPLY AIR LIQUIDE AMERICA CORP. (PANJEIVA APRIL 2024) 147 FIGURE 6.4: TOP COUNTRIES/REGIONS THAT SUPPLY H.C. STARCK INC. (USA) 148 FIGURE 6.5: PRICE TREND IN COBALT 155 FIGURE 6.6: HAFNIUM 5-YEAR PRICING 157 FIGURE 6.7: GALLIUM PRICE, 5 YEAR HISTORICAL 159 FIGURE 6.8: RUTHENIUM AND PLATINUM, 5-YEAR HISTORICAL PRICING 167 FIGURE 6.9: GERMANIUM PRICE, 5-YEAR HISTORICAL 169 LIST OF TABLES TABLE 1.1: METAL AND HI-K PRECURSORS REVENUES AND GROWTH RATES 15 TABLE 1.2: ESTIMATED METAL AND HIGH-K PRECURSOR MARKET SHARE BY SUPPLIER 2023 18 TABLE 3.1: GLOBAL GDP AND SEMICONDUCTOR REVENUES 26 TABLE 3.2: WORLD BANK ECONOMIC OUTLOOK (JANUARY 2024) 27 TABLE 3.3: BATTERY ELECTRIC VEHICLE (BEV) REGIONAL TRENDS 34 TABLE 3.4: DATA CENTER SYSTEMS AND COMMUNICATION SERVICES MARKET SPENDING 2023 38 TABLE 4.1: PRECURSORS REVENUE AND GROWTH RATES 53 TABLE 4.2: METAL AND HI-K PRECURSORS REVENUES AND GROWTH RATES 56 TABLE 4.3: ESTIMATED METAL AND HIGH-K PRECURSOR MARKET SHARE BY SUPPLIER 2023 58 TABLE 4.4: METAL & HIGH-K PRECURSOR MARKET REGIONAL ASSESSMENT 2023 59 TABLE 4.5: OVERVIEW OF ANNOUNCED 2023/2024 MATERIAL SUPPLIER INVESTMENTS 62 TABLE 4.6: LEADING EDGE LOGIC DESCRIPTIONS BY NODE (TSMC, INTEL) 78 TABLE 4.7: SELECTIVE DEPOSITION - SELECTIVELY DEPOSITED MATERIALS 97 TABLE 4.8: REGIONAL PRECURSOR MATERIAL MARKETS 103 TABLE 4.9: REGIONAL PRECURSOR MATERIAL MARKETS, CONTINUED 104 TABLE 5.1: MERCK QUARTER FINANCIALS 115 TABLE 5.2: AIR LIQUIDE CURRENT QUARTER FINANCIALS 118 TABLE 5.3: ENTEGRIS SUPPLIER CURRENT QUARTER FINANCIALS 120 TABLE 6.1: CVD AND ALD PRECURSOR 145 TABLE 6.2: ORIGIN OF MINERALS USED TO MAKE PRECURSORS 153 TABLE 6.3: COBALT MINING AND PRODUCTION BY LOCATION 154 TABLE 6.4: ZIRCONIUM AND HAFNIUM MINERAL PRODUCTION BY LOCATION 156 TABLE 6.5: GALLIUM MINERAL PRODUCTION DESCRIPTION AND DEPENDENCIES 158 TABLE 6.6: ALUMINUM MINERAL REFINING AND PRODUCTION BY LOCATION 160 TABLE 6.7: TITANIUM ORE (ILMENITE AND RUTILE) PRODUCTION LOCATIONS 161 TABLE 6.8: TUNGSTEN ORE PRODUCTION BY LOCATION 162 TABLE 6.9: MOLYBDENUM PRODUCTION AND IMPORT AND EXPORTS 163 TABLE 6.10: MOLYBDENUM PRODUCTION DESCRIPTIONS 163 TABLE 6.11: NIOBIUM AND TANTALUM PRODUCTION BY LOCATION 164 TABLE 6.12: RARE EARTHS PRODUCTION BY LOCATION , I.E. LANTHANUM 165 TABLE 6.13: PGM PRODUCTION BY LOCATION 166 TABLE 6.14: GERMANIUM APPLICATIONS BY PERCENTAGE VOLUME 168
